Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2023-053905
Category (FI): H01L21/304,648@L,H10P70/00,103@A,H10P70/00,108@L,H10P72/70,H01L21/68@N,H01L21/304,643@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 29, 2023
Publication Date: Oct. 10, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
