Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE MANAGEMENT SYSTEM, MANAGEMENT DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING DEVICE MANAGEMENT METHOD, AND SUBSTRATE PROCESSING DEVICE MANAGEMENT PROGRAM

Japan, April 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE MANAGEMENT SYSTEM, MANAGEMENT DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING DEVICE MANAGEMENT METHOD, AND SUBSTRATE PROCESSING DEVICE MANAGEMENT PROGRAM.' Other related details are as follows:

Application Number: JP,2022-038502

Category (FI): H01L21/02@Z,H10P95/00,101

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 11, 2022

Publication Date: Sept. 22, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.