Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE MANAGEMENT SYSTEM, SUBSTRATE PROCESSING DEVICE MANAGEMENT METHOD AND SUBSTRATE PROCESSING DEVICE MANAGEMENT PROGRAM

Japan, Jan. 23 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE MANAGEMENT SYSTEM, SUBSTRATE PROCESSING DEVICE MANAGEMENT METHOD AND SUBSTRATE PROCESSING DEVICE MANAGEMENT PROGRAM.' Other related details are as follows:

Application Number: JP,2022-002650

Category (FI): G05B19/418@Z,G05B23/02,302@R,H01L21/02@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 11, 2022

Publication Date: July 24, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.