Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Japan, Nov. 11 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2021-159697

Category (FI): H01L21/324,H01L21/324@X,H01L21/31@E,H01L21/316@S,H01L21/316@P

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 29, 2021

Publication Date: April 10, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.