Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Japan, Jan. 16 -- KIOXIA CORP has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-150551

Category (FI): G03F1/82,H01L21/304,643@A,H01L21/304,646,H01L21/304,647@Z,H10P70/00,103@A,H10P70/00,106,H10P70/00,107@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 21, 2022

Publication Date: April 2, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.