Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

Japan, Jan. 16 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2022-008524

Category (FI): G03F7/42,H01L21/30,572@B,H01L21/304,643@A,H01L21/304,645@C,H01L21/304,647@Z,H01L21/304,651@M,H01L21/306@R,H10P50/60@R,H10P70/00,103@A,H10P70/00,105@C,H10P70/00,107@Z,H10P70/00,201@M,H10P76/00,572@B

Stage: Grant (IP right document published.)

Filing Date: Jan. 24, 2022

Publication Date: Aug. 3, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.