Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

Japan, Jan. 21 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2022-050084

Category (FI): H01L21/90@L,H01L21/90@P,H10W20/48@L,H10W20/45@P,H10W20/44@X

Stage: Grant (IP right document published.)

Filing Date: March 25, 2022

Publication Date: Oct. 6, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.