Japan, April 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2022-157439
Category (FI): C23C18/42,H01L21/28,301@R,H01L21/288@E,H01L21/88@B,H01L21/88@M,H10D64/60,H10P14/47,101,H10P14/47,102,H10W20/00@B,H10W20/44@M,H10W20/44@X
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 30, 2022
Publication Date: April 11, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
