Japan, Aug. 18 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2023-020295
Category (FI): H01L21/76@N,H01L21/302,105@B,H01L21/76@A,H10P50/20,105@B,H10P50/28,H10W10/17,H10W10/20
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 13, 2023
Publication Date: Aug. 23, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
