Japan, Jan. 20 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM AND ETCHING DEVICE.' Other related details are as follows:
Application Number: JP,2024-104402
Category (FI): H10P50/28,H10P14/60,101@B,H01L21/31@B,H10P50/20,105@A,H01L21/302,105@A
Stage: Grant (IP right document published.)
Filing Date: June 27, 2024
Publication Date: Sept. 13, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
