Japan Intellectual Property Rights: SUBSTRATE SUPPORT BODY, SUBSTRATE PROCESSING APPARATUS, AND MANUFACTURING METHOD OF THE SUBSTRATE SUPPORT BODY

Japan, Jan. 23 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE SUPPORT BODY, SUBSTRATE PROCESSING APPARATUS, AND MANUFACTURING METHOD OF THE SUBSTRATE SUPPORT BODY.' Other related details are as follows:

Application Number: JP,2021-204536

Category (FI): B25B11/00@Z,H10P50/20,101@G,H10P14/24,H01L21/68@R,H01L21/302,101@G,H01L21/205,H10P72/72

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 16, 2021

Publication Date: Aug. 5, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.