Japan, Nov. 4 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD has got intellectual property rights for 'SUBSTRATE SUPPORT BODY INCLUDING PLURALITY OF RADIO FREQUENCY (RF) ELECTRODES.' Other related details are as follows:

Application Number: JP,2025-124252

Category (FI): H10P72/72,H10P50/20,101@G,H10P14/60,101@C,H01L21/68@R,H01L21/302,101@G,H01L21/31@C,H05H1/46@M,H05H1/46@R

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 24, 2025

Publication Date: Oct. 7, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.