Japan, Nov. 6 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD has got intellectual property rights for 'SUBSTRATE SUPPORTER INCLUDING RADIO FREQUENCY (RF) ELECTRODES.' Other related details are as follows:
Application Number: JP,2025-124254
Category (FI): H01L21/68@R,H01L21/31@C,H01L21/302,101@G,H05H1/46@M,H10P50/20,101@G,H10P72/72,H10P14/60,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 24, 2025
Publication Date: Sept. 30, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
