Japan Intellectual Property Rights: SUBSTRATE TRANSFER METHOD AND SEMICONDUCTOR MANUFACTURING SYSTEM

Japan, Jan. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE TRANSFER METHOD AND SEMICONDUCTOR MANUFACTURING SYSTEM.' Other related details are as follows:

Application Number: JP,2022-032880

Category (FI): H10P72/50@G,H01L21/68@A,H01L21/68@G,H10P72/30@A

Stage: Grant (IP right document published.)

Filing Date: March 3, 2022

Publication Date: Sept. 14, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.