Japan, April 1 -- KAWASAKI HEAVY IND LTD has got intellectual property rights for 'SUBSTRATE TRANSFER ROBOT.' Other related details are as follows:
Application Number: JP,2021-120082
Category (FI): H10P72/30@A,H01L21/68@A,B25J9/06@D
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 21, 2021
Publication Date: Nov. 18, 2021
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
