Japan, Oct. 5 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE TREATMENT APPARATUS, CONTROL SYSTEM, AND CONTROL METHOD.' Other related details are as follows:
Application Number: JP,2022-093974
Category (FI): C23C16/455,C23C16/52,H01L21/02@Z,H10P95/00,102@B,H10P95/00,102@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 9, 2022
Publication Date: Dec. 21, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
