Japan, June 10 -- FEEDBACK TECHNOLOGY CORP has got intellectual property rights for 'SURFACE STRUCTURE OF ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING THE SAME.' Other related details are as follows:
Application Number: JP,2024-199975
Category (FI): H10P72/72,H01L21/68@R,C23C16/458,C23C14/50@A
Stage: Grant (IP right document published.)
Filing Date: Nov. 15, 2024
Publication Date: June 19, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
