Japan, Aug. 18 -- APPLIED MATERIALS INC has got intellectual property rights for 'TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING.' Other related details are as follows:
Application Number: JP,2024-181498
Category (FI): B24B37/00@K,H01L21/304,622@R,B24B57/02,B24B49/14,B24B37/10,H10P52/00@U,B24B37/005@Z,B24B37/015
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 17, 2024
Publication Date: Feb. 12, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
