Japan, June 10 -- GIGAPHOTON INC,NATIONAL INSTITUTES OF NATURAL SCIENCES has got intellectual property rights for 'ULTRAVIOLET LASER APPARATUS, METHOD AND SYSTEM FOR MANUFACTURING ELECTRONIC DEVICE.' Other related details are as follows:
Application Number: JP,2024-230077
Category (FI): H01S3/10@Z,G02B27/28@A,H01S3/109,H01S3/106,H01S3/23
Stage: Grant (IP right document published.)
Filing Date: Dec. 26, 2024
Publication Date: March 26, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
