Japan, Jan. 16 -- TOKYO ELECTRON LTD has got intellectual property rights for 'VACUUM HEAT TREATMENT APPARATUS.' Other related details are as follows:
Application Number: JP,2022-097388
Category (FI): H01L21/68@N,H10P72/70
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 16, 2022
Publication Date: Dec. 28, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
