Japan, Jan. 15 -- DISCO ABRASIVE SYST LTD has got intellectual property rights for 'WAFER HOLDER.' Other related details are as follows:
Application Number: JP,2021-189583
Category (FI): B23Q3/08@A,B23Q7/04@K,B24B41/06@A,B24B41/06@L,H01L21/304,622@H,H01L21/68@P,H10P52/00@L,H10P72/78
Stage: Grant (IP right document published.)
Filing Date: Nov. 22, 2021
Publication Date: June 1, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
