Japan Intellectual Property Rights: WAFER ROTATION HOLDING DEVICE

Japan, Jan. 20 -- TOKYO SEIMITSU CO LTD has got intellectual property rights for 'WAFER ROTATION HOLDING DEVICE.' Other related details are as follows:

Application Number: JP,2022-034895

Category (FI): H10P70/00,108@A,H01L21/68@N,H01L21/304,648@A,H01L21/304,643@A,H10P72/70,H10P70/00,103@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 8, 2022

Publication Date: Sept. 21, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.