Japan Intellectual Property Rights: WAFER WOBBLING DETECTION METHOD AND WAFER WOBBLING DETECTION SYSTEM

Japan, June 10 -- GSF SOLUTION CO LTD has got intellectual property rights for 'WAFER WOBBLING DETECTION METHOD AND WAFER WOBBLING DETECTION SYSTEM.' Other related details are as follows:

Application Number: JP,2024-196785

Category (FI): H01L21/304,648@G,H01L21/66@J,H01L21/02@Z,H10P70/00,103@A,H10P74/20@J,H10P70/00,108@G,H01L21/304,643@A

Stage: Grant (IP right document published.)

Filing Date: Nov. 11, 2024

Publication Date: May 27, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.