Japan, Jan. 21 -- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY has got intellectual property rights for 'WET PROCESSOR.' Other related details are as follows:
Application Number: JP,2022-026920
Category (FI): H01L21/304,648,H01L21/304,643@A,H01L21/68@A,H10P70/00,103@A,H10P70/00,108,H10P72/30@A
Stage: Grant (IP right document published.)
Filing Date: Feb. 24, 2022
Publication Date: Sept. 5, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
